Germanium surface wet-etch-reconditioning for porous lift-off and substrate reuse
Alexandre Chapotot, Bouraoui Ilahi, Javier Arias‐Zapata, Tadeáš Hanuš, Ahmed Ayari, Gwénaëlle Hamon, Jinyoun Cho, Kristof Dessein, Maxime Darnon, Abderraouf Boucherif
Topics & Concepts
Materials scienceSubstrate (aquarium)Chemical-mechanical planarizationLayer (electronics)Surface roughnessPolishingReuseIsotropic etchingNanotechnologyEtching (microfabrication)Chemical engineeringComposite materialWaste managementOceanographyEngineeringGeologySemiconductor materials and devicesSilicon Nanostructures and PhotoluminescenceNanowire Synthesis and Applications