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Exploring the direction-dependency of conductive filament formation and oxygen vacancy migration behaviors in HfO<sub>2</sub>-based RRAM

Donglan Zhang, Jiong Wang, Qing Wu, Yong Du

2022Physical Chemistry Chemical Physics16 citationsDOI

Abstract

Oxygen vacancy (V O ) defects play an essential role in governing the conductivity of semiconductor materials.

Topics & Concepts

Resistive random-access memoryOxygenVacancy defectAnnealing (glass)ConductivityCondensed matter physicsElectrical conductorMaterials scienceValence (chemistry)ChemistryChemical physicsNanotechnologyCrystallographyElectrodeComposite materialPhysical chemistryPhysicsOrganic chemistryAdvanced Memory and Neural ComputingFerroelectric and Negative Capacitance DevicesSemiconductor materials and devices
Exploring the direction-dependency of conductive filament formation and oxygen vacancy migration behaviors in HfO<sub>2</sub>-based RRAM | Litcius