Controlled sputter deposition of oxide nanoparticles-based composite thin films
Kalyani Shaji, Stanislav Haviar, P. Zeman, Šimon Kos, R. Čerstvý, Jiří Čapek
Topics & Concepts
Materials scienceNanoparticleComposite numberDeposition (geology)Sputter depositionScanning electron microscopeThin filmChemical engineeringMonolayerVolumetric flow rateNanotechnologySputteringAnalytical Chemistry (journal)Composite materialChromatographyChemistryQuantum mechanicsSedimentPaleontologyEngineeringBiologyPhysicsZnO doping and propertiesGas Sensing Nanomaterials and SensorsCopper-based nanomaterials and applications