Effect of cations on silicon anisotropic etching process in solutions containing TMAH and TMAH with tensioactive compounds
Irena Zubel
Topics & Concepts
Etching (microfabrication)SiliconChemistryReactive-ion etchingAnisotropyChemical engineeringMaterials scienceAnalytical Chemistry (journal)Nuclear chemistryNanotechnologyChromatographyOrganic chemistryLayer (electronics)EngineeringQuantum mechanicsPhysicsAdvanced MEMS and NEMS TechnologiesAdvanced Surface Polishing TechniquesSilicon Nanostructures and Photoluminescence