Subsurface damage pattern and formation mechanism of monocrystalline β-Ga2O3 in grinding process
Xin Yang, Renke Kang, Shang Gao, Zihe Wu, Xianglong Zhu
Topics & Concepts
Monocrystalline siliconGrindingMechanism (biology)Process (computing)Materials scienceProcess engineeringMetallurgyEngineeringComputer sciencePhysicsSiliconOperating systemQuantum mechanicsGa2O3 and related materialsElectronic and Structural Properties of OxidesZnO doping and properties