Development of super-smooth flat silicon mirror substrates using bowl-feed chemical-mechanical polishing
Akash Belure, Aritra Biswas, Digvijay Raghunathan, Rishipal, S. Bhartiya, Rashmi Singh, Sanjay Rai, Raju Pawade, M. P. Kamath, N. S. Benerji
Topics & Concepts
PolishingSiliconMaterials scienceChemical-mechanical planarizationSubstrate (aquarium)Surface roughnessScanning electron microscopeOpticsSurface finishOptoelectronicsX-ray reflectivityComposite materialNanotechnologyThin filmGeologyPhysicsOceanographyAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesDiamond and Carbon-based Materials Research