Si precursor inhibitors for area selective deposition of Ru
Bonwook Gu, Sumaira Yasmeen, Geun-Ha Oh, Il‐Kwon Oh, Youngho Kang, Han‐Bo‐Ram Lee
Topics & Concepts
Deposition (geology)Materials scienceChemistryNanotechnologyChemical engineeringCombinatorial chemistryGeologyEngineeringPaleontologySedimentSemiconductor materials and devicesSemiconductor materials and interfacesMetal and Thin Film Mechanics