Aluminum Oxide Nanoparticle Films Deposited from a Nonthermal Plasma: Synthesis, Characterization, and Crystallization
Zhaohan Li, Parker Wray, Magel P. Su, Qiaomiao Tu, Himashi P. Andaraarachchi, Yong Jin Jeong, Harry A. Atwater, Uwe Kortshagen
Abstract
at 1100 °C, while powders of large 11 nm particles remained in the θ and γ phases. This phenomenon is attributed to the fast rate of densification and neck formation in small amorphous aluminum oxide particles.
Topics & Concepts
Amorphous solidMaterials scienceCrystallizationNanoparticleChemical engineeringAnnealing (glass)OxideAluminiumNanotechnologyMetallurgyCrystallographyChemistryEngineeringSemiconductor materials and devicesSilicon Nanostructures and PhotoluminescenceAdvanced ceramic materials synthesis