Stabilization of the Nano-Sized 1T Phase through Rhenium Doping in the Metal–Organic CVD MoS<sub>2</sub> Films
Р. И. Романов, Ivan V. Zabrosaev, Maxim G. Kozodaev, Dmitry I. Yakubovsky, Mikhail K. Tatmyshevskiy, Aleksey A. Timofeev, Natalia V. Doroshina, Sergey M. Novikov, Valentyn S. Volkov, Andrey M. Markeev
Abstract
High Resolution Image Download MS PowerPoint Slide Heterogeneous nanostructures composed of metastable tetragonal 1T-MoS 2 and stable hexagonal 2H-MoS 2 phases are highly promising for a wide range of applications, including catalysis and ion batteries, due to the high electrical conductivity and catalytic activity of the 1T phase. However, a controllable synthesis of stabilized 1T-MoS 2 films over the wafer-scale area is challenging. In this work, a metal–organic chemical vapor deposition process allowing us to obtain ultrathin MoS 2 films containing both 1T and 2H phases and control their ratio through rhenium doping was suggested. As a result, Mo 1– x Re x S 2 films with a 1T-MoS 2 fraction up to ≈30% were obtained, which were relatively stable under normal conditions for a long time. X-ray photoelectron spectroscopy and Raman spectroscopy also indicated that the 1T-MoS 2 phase fraction increased with rhenium concentration increase saturating at Re concentrations above 5 at. %. Also, its concentration was found to significantly affect the film resistivity. Thus, the resistivity of the film containing approximately 30% of the 1T phase was about 130 times lower than that of the film without the 1T phase.