Fabrication of high aspect ratio grooves on aluminium nitride by laser and chemical milling enhanced micro milling
Ni Chen, Jiawei Liu, Ning He, Xingzhi Xiao, Junyi Zhao, Yibo Jia, Nan Yu
Topics & Concepts
Materials scienceAluminiumSurface roughnessGroove (engineering)MachiningLaserAllowance (engineering)Surface finishCeramicNitrideMilling cutterComposite materialFabricationMetallurgyOpticsMechanical engineeringLayer (electronics)Alternative medicinePhysicsEngineeringMedicinePathologyAdvanced machining processes and optimizationAdvanced Surface Polishing TechniquesAdvanced Machining and Optimization Techniques