Angular-dependent deposition of MoNbTaVW HEA thin films by three different physical vapor deposition methods
Ao Xia, Alessandro Togni, Sabrina Hirn, Giovanni Bolelli, Luca Lusvarghi, Robert Franz
Topics & Concepts
Sputter depositionDeposition (geology)Materials scienceThin filmHigh-power impulse magnetron sputteringPhysical vapor depositionAlloyCavity magnetronChemical engineeringSputteringAnalytical Chemistry (journal)Composite materialNanotechnologyChemistryGeologyEngineeringSedimentChromatographyPaleontologyHigh Entropy Alloys StudiesHigh-Temperature Coating BehaviorsMetal and Thin Film Mechanics