Novel AlN/ScAlN composite film SAW for achieving highly sensitive temperature sensors
Yuanhang Qu, Xiang Chen, Yan Liu, Shengxiang Wang, Xiyu Gu, Min Wei, Xiaoming Huang, Zesheng Liu, Jiaqi Ding, Zhiwei Wen, Yao Cai, Shishang Guo, Chengliang Sun
Topics & Concepts
Composite numberMaterials scienceOptoelectronicsEngineering physicsComposite materialNanotechnologyEngineeringAcoustic Wave Resonator TechnologiesGas Sensing Nanomaterials and SensorsMechanical and Optical Resonators