Litcius/Paper detail

Precise preparation of quartz pendulous reed by using picosecond laser modification assisted wet etching

Yunpeng Ren, Cheng Li, Xincheng Tu, Kun He, Yunxia Ye, Yufeng Tao, Xudong Ren

2023Optics & Laser Technology13 citationsDOI

Topics & Concepts

Materials sciencePicosecondFemtosecondEtching (microfabrication)LaserQuartzIsotropic etchingOptoelectronicsFused quartzOpticsComposite materialLayer (electronics)PhysicsLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesAdvanced machining processes and optimization