Precise preparation of quartz pendulous reed by using picosecond laser modification assisted wet etching
Yunpeng Ren, Cheng Li, Xincheng Tu, Kun He, Yunxia Ye, Yufeng Tao, Xudong Ren
Topics & Concepts
Materials sciencePicosecondFemtosecondEtching (microfabrication)LaserQuartzIsotropic etchingOptoelectronicsFused quartzOpticsComposite materialLayer (electronics)PhysicsLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesAdvanced machining processes and optimization