Fabrication of tungsten nitride thin films by superimposed HiPIMS and MF system: Effects of nitrogen flow rate
Bih-Show Lou, Igamcha Moirangthem, Jyh‐Wei Lee
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceCoatingSputteringVolumetric flow rateNitrideTungstenThin filmZirconium nitrideAnalytical Chemistry (journal)Sputter depositionFabricationComposite materialMetallurgyNanotechnologyLayer (electronics)Titanium nitrideChemistryThermodynamicsAlternative medicinePhysicsPathologyChromatographyMedicineMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchGaN-based semiconductor devices and materials