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Miniature Electrodynamic Wireless Power Transmission Receiver Using a Micromachined Silicon Suspension

Miah A. Halim, Adrian A. Rendon-Hernandez, Spencer E. Smith, J. Samman, Nicolas Garraud, David P. Arnold

2021Journal of Microelectromechanical Systems19 citationsDOI

Abstract

We present the design, modeling, fabrication, and experimental characterization of an electrodynamic wireless power transmission (EWPT) receiver for low-frequency (<; 1 kHz), near-field wireless power transmission. The device utilizes a bulk-micromachined silicon serpentine suspension, two NdFeB magnets and two precision-manufactured coils. The architecture of the transducer is designed to maximize the electrodynamic coupling coefficient while maintaining a low mechanical resonant frequency in order to maximize the power density for low-frequency wireless power transmission. An equivalent lumped-element circuit model is established to parameterize the system and to predict the output performance of the proposed system. A prototype device is fabricated, assembled and tested, and the results are compared with the model prediction. The 0.31 cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> device generates 2.46 mW average power (7.9 mW·cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-3</sup> power density) at 4 cm distance from a transmitter coil operating at 821 Hz and safely within allowable human exposure limits. This data corresponds to a normalized power density of 21.9 mW·cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-3</sup> ·mT <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-2</sup> , which is 44% higher than similar reported devices. Based on these results, this device shows great suitability for wirelessly charging mobile, wearable and bio-implantable devices. [2020-0161]

Topics & Concepts

Electrical engineeringPower (physics)Power densityTransmitterTransmission (telecommunications)Coupling coefficient of resonatorsWirelessElectromagnetic coilCoupling (piping)Computer sciencePhysicsMaterials scienceElectronic engineeringTopology (electrical circuits)EngineeringTelecommunicationsMechanical engineeringChannel (broadcasting)Quantum mechanicsResonatorWireless Power Transfer SystemsEnergy Harvesting in Wireless NetworksInnovative Energy Harvesting Technologies
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