Comparative study of TiAlN coatings deposited by different high-ionization physical vapor deposition techniques
Liangliang Liu, Wei Tang, Lin Zhou, Zhongcan Wu, Zhongcan Wu, Qingdong Ruan, Xiaoyuan Li, Abdul Mateen Qasim, Suihan Cui, Tijun Li, Ricky K.Y. Fu, Xiubo Tian, Zhongzhen Wu, Zhongzhen Wu, Paul K. Chu
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceCoatingPhysical vapor depositionSputter depositionIon platingIonizationCavity magnetronSputteringDeposition (geology)Composite materialSurface roughnessMetallurgyIonThin filmNanotechnologySedimentPaleontologyBiologyPhysicsQuantum mechanicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchGaN-based semiconductor devices and materials