Molecular dynamics simulations in semiconductor material processing: A comprehensive review
Yixin Yun, Shujing Wu, Dazhong Wang, Xiangcheng Luo, Jiapeng Chen, Guoqiang Wang, Akiyama Takao, Lei Wan
Topics & Concepts
Molecular dynamicsSemiconductorDynamics (music)Systems engineeringComputer scienceNanotechnologyEngineering physicsMaterials scienceEngineeringPhysicsOptoelectronicsChemistryComputational chemistryAcousticsSemiconductor materials and devicesAdvanced Surface Polishing TechniquesAdvancements in Semiconductor Devices and Circuit Design