Novel Si nanostructures via Ag-assisted chemical etching route on single and polycrystalline substrates
Aliaa M. Salem, Farid A. Harraz, Said M. El‐Sheikh, S. İsmat Shah
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyIsotropic etchingEtching (microfabrication)NanotechnologyWaferSiliconCrystallinityScanning electron microscopeNanowireSemiconductorPorous siliconNanostructureChemical engineeringNanosphere lithographyPhotoluminescenceDry etchingOptoelectronicsLayer (electronics)Composite materialAlternative medicineMedicinePathologyFabricationEngineeringNanowire Synthesis and ApplicationsSilicon Nanostructures and PhotoluminescenceSemiconductor materials and devices