Investigation of emission lines for in-situ elemental analysis of Cu–Zn films deposited by sputtering
Susumu Imashuku, Haruka Narita, Kazuaki Wagatsuma
Topics & Concepts
SputteringAnalytical Chemistry (journal)Emission intensityDeposition (geology)Materials scienceEmission spectrumIntensity (physics)Thin filmSputter depositionComposition (language)In situZincChemistrySpectral linePhotoluminescenceMetallurgyOpticsOptoelectronicsNanotechnologyEnvironmental chemistryPhysicsSedimentPaleontologyOrganic chemistryLinguisticsAstronomyBiologyPhilosophyMetal and Thin Film MechanicsCopper Interconnects and ReliabilityZnO doping and properties