Phase-controlled molybdenum dioxide electrodes by RF reactive magnetron sputtering for achieving high-k rutile TiO2 dielectric
J.H. Lee, Wangu Kang, Hong Keun Chung, Seong Keun Kim, Jeong Hwan Han
Topics & Concepts
Materials scienceSputteringSputter depositionAnalytical Chemistry (journal)Orthorhombic crystal systemMonoclinic crystal systemRutileThin filmNanotechnologyChemical engineeringCrystal structureChemistryCrystallographyEngineeringChromatographySemiconductor materials and devicesAdvanced Memory and Neural ComputingZnO doping and properties