Enhancing industrialization TOPCon solar cell efficiency via comprehensive anti-reflection passivation film optimization
Wenhao Chen, Shengxing Zhou, Weiqing Liu, Yingming Wang, Penghui Chen, Yuanyuan Yu, Yimao Wan
Topics & Concepts
PassivationMaterials scienceDangling bondSolar cellPlasmaSilicon nitrideOxideEllipsometryChemical engineeringOptoelectronicsRemote plasmaSiliconLayer (electronics)NanotechnologyThin filmMetallurgyChemical vapor depositionQuantum mechanicsEngineeringPhysicsSilicon and Solar Cell TechnologiesSemiconductor materials and devicesThin-Film Transistor Technologies