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Polyacrylic Acid as a Lubricant and a Complement to 1,2,4-Triazole for Copper Chemical Mechanical Polishing

Liang Jiang, Qiuyu Li, Yushan Chen, Yuan Wu, Mao Sun, Linmao Qian

2023Tribology Letters17 citationsDOI

Topics & Concepts

Chemical-mechanical planarizationCopperMaterials scienceLubricantPolyacrylic acidPolishingSurface roughnessChemical engineeringSlurryPolymerCorrosionMetallurgyComposite materialNanotechnologyEngineeringAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationIntegrated Circuits and Semiconductor Failure Analysis
Polyacrylic Acid as a Lubricant and a Complement to 1,2,4-Triazole for Copper Chemical Mechanical Polishing | Litcius