Current status and future developments of the ion beam facility at the centre of micro-analysis of materials in Madrid
A. Redondo‐Cubero, M. J. G. Borge, N. Gordillo, P.C. Gutiérrez, J. Olivares, R. Pérez Casero, M.D. Ynsa
Topics & Concepts
Ion beamIon beam analysisBeam (structure)Engineering physicsIonParticle acceleratorPhysicsAerospace engineeringNuclear engineeringEngineeringOpticsQuantum mechanicsIon-surface interactions and analysisElectron and X-Ray Spectroscopy TechniquesIntegrated Circuits and Semiconductor Failure Analysis