Investigation on mechanism of mechanical activation and chemical reactions in CMP of diamond assisted by hydroxyl free radicals
Yan He, Guanxu Zhou, Meiling Tang, Lin Fan, Xingjun Gao, Jingting Sun
Topics & Concepts
RadicalDiamondReaction mechanismChemical reactionChemistryMechanism (biology)Materials scienceChemical engineeringComposite materialOrganic chemistryCatalysisEpistemologyPhilosophyEngineeringDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesAdvanced materials and composites