Principle, implementation, and applications of charge control for piezo-actuated nanopositioners: A comprehensive review
Chen Yang, Kamal Youcef‐Toumi
Topics & Concepts
MechatronicsActuatorPiezoelectricityCharge controlControl engineeringFeed forwardPosition (finance)Computer scienceControl (management)EngineeringControl theory (sociology)Electrical engineeringPhysicsArtificial intelligencePower (physics)EconomicsBattery (electricity)FinanceQuantum mechanicsPiezoelectric Actuators and ControlForce Microscopy Techniques and ApplicationsCellular Mechanics and Interactions