Deposition and structural investigation of uniform AlN(100) films at wafer scale through RF magnetron sputtering
Zhengwang Cheng, Xinhang Wang, Jun Gao, Mei Wang, Aobo Wang, Huating Bo, Zhenghao Guo, Wei Zou, Xinguo Ma
Topics & Concepts
Materials scienceWaferSputter depositionSputteringCrystallinityOptoelectronicsFabricationCrystalliteDeposition (geology)Substrate (aquarium)DislocationCavity magnetronComposite materialRadio frequencyThin filmNanotechnologyMetallurgyElectrical engineeringAlternative medicinePaleontologyGeologyMedicineBiologySedimentPathologyOceanographyEngineeringAcoustic Wave Resonator TechnologiesGaN-based semiconductor devices and materialsMetal and Thin Film Mechanics