Molecular dynamics study of the effect of water lubrication three-body polishing sapphire
Zongrui Li, Xiaojing Yang, Yunlong Li, Yao Tong
Topics & Concepts
PolishingAbrasiveSapphireMaterials scienceChemical-mechanical planarizationSurface roughnessLubricationGrain sizeSurface finishComposite materialMetallurgyOpticsPhysicsLaserAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization