Zirconium and/or cerium-containing mesoporous silica as functional active abrasive particles for radical-facilitated chemical mechanical polishing
Zichen Tang, Yang Chen, Wenjin Zhou, Luning Zhong, Ailian Chen
Topics & Concepts
CeriumZirconiumMaterials scienceAbrasiveMesoporous silicaPolishingChemical-mechanical planarizationMesoporous materialMetallurgyMesoporous organosilicaChemical engineeringChemistryCatalysisOrganic chemistryEngineeringAdvanced Surface Polishing TechniquesCatalytic Processes in Materials SciencePolymer Surface Interaction Studies