Template-free lithography for cross-scale channels towards enhancing nanofluidic devices
Lei Wu, Kedong Shang, Tingting Chen, Chengqiang Feng, Tingting Yang, Zhi-Jun Zhao, Bingjun Yu, Linmao Qian
Topics & Concepts
MiniaturizationNanotechnologyFabricationLithographyPhotolithographyMaterials scienceMicrofabricationEtching (microfabrication)MicrofluidicsIsotropic etchingOptoelectronicsLayer (electronics)MedicineAlternative medicinePathologyForce Microscopy Techniques and ApplicationsAdvanced Surface Polishing TechniquesNanofabrication and Lithography Techniques