Edge effect during microwave plasma chemical vapor deposition diamond-film: Multiphysics simulation and experimental verification
Zhiliang Yang, Kang An, Yuchen Liu, Zhijian Guo, Siwu Shao, Jinlong Liu, Junjun Wei, Liangxian Chen, Lishu Wu, Chengming Li
Topics & Concepts
MultiphysicsChemical vapor depositionDiamondMicrowavePlasmaMaterials scienceEnhanced Data Rates for GSM EvolutionNuclear engineeringIon sourceDeposition (geology)OptoelectronicsEngineering physicsEngineeringComposite materialNuclear physicsPhysicsThermodynamicsFinite element methodGeologyTelecommunicationsSedimentPaleontologyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsPlasma Diagnostics and Applications