Fabrication of micro-nano hierarchical grating using revolving trajectory of nanoindenter
Jiqiang Wang, Wenhan Zhu, Aoxiang Zhang, Yongda Yan, Hu Huang, Yanquan Geng, Chen Li
Topics & Concepts
NanoindenterMaterials scienceNano-FabricationGratingNanotechnologyTrajectoryOpticsOptoelectronicsComposite materialNanoindentationPhysicsMedicineAlternative medicineAstronomyPathologyNanofabrication and Lithography TechniquesAdvanced Surface Polishing TechniquesForce Microscopy Techniques and Applications