Virtual metrology for chemical mechanical planarization of semiconductor wafers
Balamurugan Deivendran, Vishnu Swaroopji Masampally, Naga Ravikumar Varma Nadimpalli, Venkataramana Runkana
Topics & Concepts
Chemical-mechanical planarizationWaferMetrologyMaterials scienceSemiconductor device fabricationSemiconductorSemiconductor industrySemiconductor deviceOptoelectronicsPolishingEngineering physicsNanotechnologyManufacturing engineeringEngineeringMetallurgyOpticsPhysicsLayer (electronics)Advanced Surface Polishing TechniquesAdvanced Measurement and Metrology TechniquesAdvanced machining processes and optimization