Atomic-scale and damage-free polishing of single crystal diamond enhanced by atmospheric pressure inductively coupled plasma
Hu Luo, Muhammad Ajmal Khan, Peng Liu, Kazuya Yamamura, Hui Deng
Topics & Concepts
PolishingInductively coupled plasmaDiamondMaterials scienceAtmospheric pressureInductively coupled plasma atomic emission spectroscopyAtmospheric-pressure plasmaPlasmaAtomic force microscopyAnalytical Chemistry (journal)MetallurgyNanotechnologyChemistryEnvironmental chemistryPhysicsMeteorologyQuantum mechanicsDiamond and Carbon-based Materials ResearchIon-surface interactions and analysisAdvanced Surface Polishing Techniques