Effects of He on the recrystallization and Mg diffusion in Mg ion implanted CVD-SiC
Min Liu, Hengfeng Gong, Wenguan Liu, Renduo Liu, Cao Jianqing
Topics & Concepts
Recrystallization (geology)Amorphous solidAnnealing (glass)IonMaterials scienceIon implantationAnalytical Chemistry (journal)DiffusionSurface layerCrystallographyChemistryMetallurgyLayer (electronics)NanotechnologyPhysicsThermodynamicsChromatographyOrganic chemistryPaleontologyBiologyIon-surface interactions and analysisIntegrated Circuits and Semiconductor Failure AnalysisSilicon Carbide Semiconductor Technologies