Simulation and experimental study of ultrasound-chemical synergistic mechanism for ultrasound-assisted chemical-mechanical polishing of single-crystal silicon carbide
Jialong Wu, Linzheng Ye, Xijing Zhu, Yao Liu, Tongtong Li, Wanqi Zhang, Boyang Lv
Topics & Concepts
Materials sciencePolishingSilicon carbideUltrasoundMechanism (biology)CarbideCrystal (programming language)SiliconSingle crystalComposite materialMetallurgyCrystallographyAcousticsComputer scienceProgramming languagePhilosophyEpistemologyPhysicsChemistryAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesAdvanced machining processes and optimization