Effect of amino acid complexing agents on chemical mechanical polishing performance and action mechanism of C-plane sapphire: Combining experiments and theoretical calculations
Yida Zou, Xinhuan Niu, Ni Zhan, Jianghao Liu, Xinjie Li, Chao He, Changxin Dong, Jianwei Zhou
Topics & Concepts
SapphireAmino acidX-ray photoelectron spectroscopyFourier transform infrared spectroscopyChelationChemistryAqueous solutionMoleculeCovalent bondMaterials scienceCombinatorial chemistryInorganic chemistryOrganic chemistryChemical engineeringBiochemistryOpticsLaserPhysicsEngineeringAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesDiamond and Carbon-based Materials Research