Tailoring CrNx stoichiometry and functionality by means of reactive HiPIMS
J.C. Sánchez-López, A. Caro, G. Alcalá, T.C. Rojas
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceStoichiometryMicrostructureDuty cycleBiasingNitrogenAnalytical Chemistry (journal)ModulusChemical compositionElastic modulusSputter depositionSputteringComposite materialThin filmNanotechnologyThermodynamicsVoltageChemistryPhysical chemistryPhysicsOrganic chemistryChromatographyPower (physics)Quantum mechanicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research