Effects of slurry pH on chemical and mechanical actions during chemical mechanical polishing of YAG
Qing Mu, Zhuji Jin, Xiaolong Han, Ying Yan, Zili Zhang, Ping Zhou
Topics & Concepts
Chemical-mechanical planarizationPolishingSlurryMaterials scienceX-ray photoelectron spectroscopyChemical bondChemical reactionChemical engineeringComposite materialChemistryOrganic chemistryBiochemistryEngineeringAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesDiamond and Carbon-based Materials Research