Excimer laser marking − A precise patterning technique for material surfaces
J. D. Shao, Liang Xu, Ying Lin, Qihui Shen, Jiacheng Ren, Jinliang Han
Topics & Concepts
LaserExcimer laserUltravioletMaterials sciencePenetration depthExcimerOpticsOptoelectronicsMachiningX-ray laserComputer scienceNanotechnologyLaser power scalingPhysicsMetallurgyLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesLaser-induced spectroscopy and plasma