Design principles for ultra-low humidity sensors: a mechanism-oriented review
Noor Alam, Yonggao Yin
Abstract
The precise detection of ultra-low relative humidity (<10% RH) is essential in semiconductor manufacturing, lithium-ion battery production, and aerospace systems, where even trace amounts of moisture can lead to irreversible performance degradation.
Topics & Concepts
HumidityDesign elements and principlesMaterials scienceAerospaceRelative humidityMoistureTRACE (psycholinguistics)Battery (electricity)SemiconductorSemiconductor industryEnvironmental scienceNanotechnologyEngineering physicsProcess engineeringSystems engineeringGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesAnalytical Chemistry and Sensors