An oversampling method for wafer map defect pattern classification considering small and imbalanced data
Eun‐Su Kim, Seung-Hyun Choi, Dong‐Hee Lee, Kwang-Jae Kim, Young-Mok Bae, Young-Chan Oh
Topics & Concepts
WaferComputer scienceTest dataProcess (computing)Artificial intelligenceConvolutional neural networkSemiconductor device fabricationData miningWafer testingPattern recognition (psychology)Electronic engineeringEngineeringElectrical engineeringProgramming languageOperating systemIndustrial Vision Systems and Defect DetectionImage and Object Detection TechniquesIntegrated Circuits and Semiconductor Failure Analysis