Investigation of defect structure in homoepitaxial <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si1.svg"><mml:mrow><mml:mo stretchy="true">(</mml:mo><mml:mrow><mml:mover accent="true"><mml:mn>2</mml:mn><mml:mo>¯</mml:mo></mml:mover></mml:mrow><mml:mn>01</mml:mn><mml:mo stretchy="true">)</mml:mo></mml:mrow></mml:math> β-Ga2O3 layers prepared by plasma-assisted molecular beam epitaxy

Trong Si Ngo, Duc Duy Le, Jungkuk Lee, Soon‐Ku Hong, Jun‐Seok Ha, Woo-Sik Lee, Youngboo Moon