Litcius/Paper detail

Tribological effects of loose alumina abrasive assisted sapphire lapping by a fixed agglomerated diamond abrasive pad (FADAP)

Jiapeng Chen, Yanan Peng, Zhankui Wang, Tao Sun, Jianxiu Su, Dunwen Zuo, Yongwei Zhu

2022Materials Science in Semiconductor Processing33 citationsDOI

Topics & Concepts

AbrasiveLappingMaterials scienceDiamondSapphireSlurryTribologyComposite materialCeramicParticle sizeMetallurgyChemical engineeringOpticsPhysicsEngineeringLaserAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization