A novel green chemical mechanical polishing for potassium dihydrogen phosphate using corn oil slurry
Xing Cui, Zhenyu Zhang, Chao Shi, Fanning Meng, Guoliang Xu, Wei Xie, Zhuang Liu, J. Wang, W. Wen
Topics & Concepts
SlurryPotassiumPhosphatePolishingCorn oilPotashChemical-mechanical planarizationPotassium phosphateChemistryPulp and paper industryMaterials scienceNuclear chemistryChemical engineeringFood scienceOrganic chemistryComposite materialEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchHigh-pressure geophysics and materials