Influence of unintentional H2O introduction in sputtering chamber on ITO films and HJT solar cells
Mengxiao Wang, Guanghong Wang, Mengqi Hu, Lei Zhao, Xiaohua Xu, Jihong Xiao, Daoren Gong, Changyue Yu, Libin Mo, Hongwei Diao, Wenjing Wang
Topics & Concepts
Partial pressureMaterials scienceSputteringIndium tin oxideSolar cellTransmittanceAnalytical Chemistry (journal)Degradation (telecommunications)Sputter depositionOptoelectronicsChemistryComposite materialThin filmNanotechnologyLayer (electronics)Electronic engineeringOxygenEngineeringChromatographyOrganic chemistrySilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesChalcogenide Semiconductor Thin Films