Influence of power on the physical and electrical properties of magnetron sputtered gadolinium oxide thin films for MOS capacitors
G. Arun Kumar Thilipan, Ashwath Rao
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Materials scienceSputteringX-ray photoelectron spectroscopyThin filmCrystallinitySputter depositionAnalytical Chemistry (journal)OptoelectronicsDiffractometerCapacitorOxideNuclear magnetic resonanceScanning electron microscopeNanotechnologyVoltageComposite materialElectrical engineeringMetallurgyChromatographyPhysicsEngineeringChemistrySemiconductor materials and devicesSemiconductor materials and interfacesAdvancements in Semiconductor Devices and Circuit Design