TiSiN/AlCrN multilayer coatings with gradient modulation period deposited by HiPIMS: Mechanical and tribological properties
Rong Tu, Yuanping Qiao, Mai Yang, Mingquan Jiang, Yibing Su, Yuzhe Han, Qizhong Li, Meijun Yang, Song Zhang, Takashi Goto
Topics & Concepts
High-power impulse magnetron sputteringTribologyMaterials sciencePeriod (music)Modulation (music)Composite materialMetallurgyNanotechnologyThin filmSputter depositionSputteringPhysicsAcousticsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research