Analyzing industrial CVD reactors using a porous media approach
Siyu Zou, Jie Xiao, Viola Wu, Xiao Dong Chen
Topics & Concepts
CoatingSubstrate (aquarium)Process engineeringMaterials scienceProcess (computing)Mixing (physics)Chemical vapor depositionComputational fluid dynamicsPorosityDeposition (geology)Quality (philosophy)Computer scienceNanotechnologyComposite materialEngineeringAerospace engineeringOceanographyPhysicsGeologyQuantum mechanicsPhilosophyPaleontologyOperating systemBiologySedimentEpistemologyFluid Dynamics and Thin FilmsLattice Boltzmann Simulation StudiesMetallurgical Processes and Thermodynamics