Effect of ionic oxygen concentration on properties of SiO2 and Ta2O5 monolayers deposited by ion beam sputtering
Chang Chen, Yanzhi Wang, Jijun Feng, Zhihao Wang, Yu Chen, Yesheng Lu, Yuhui Zhang, Dawei Li, Yun Cui, Jianda Shao
Topics & Concepts
OxygenAbsorption (acoustics)Analytical Chemistry (journal)Materials scienceSputteringIonic bondingThin filmLimiting oxygen concentrationIonChemistryNanotechnologyComposite materialChromatographyOrganic chemistryMetal and Thin Film MechanicsAdvanced Fiber Laser TechnologiesDiamond and Carbon-based Materials Research