Computational fluid dynamics modeling of a new high-pressure chemical vapor deposition reactor design
Pedram Yousefian, Siddha Pimputkar
Topics & Concepts
Chemical vapor depositionSusceptorMetalorganic vapour phase epitaxyNitrideChemistryThin filmDeposition (geology)Atmospheric pressureVolumetric flow rateAnalytical Chemistry (journal)Materials scienceNanotechnologyThermodynamicsEnvironmental chemistryOrganic chemistryMeteorologyLayer (electronics)PhysicsSedimentPaleontologyEpitaxyBiologyPlasma Diagnostics and ApplicationsElectrohydrodynamics and Fluid DynamicsPlasma Applications and Diagnostics